無塵室室等級區分
每立方英呎（美國標淮）或每立方米（ISO標准）最高可容許粒子數目
| 209E | ISO | 0.1μm/ft3 | 0.1μm/m3 | 0.2μm/ft3 | 0.2μm/m3 | 0.3μm/ft3 | 0.3μm/m3 | 0.5μm/ft3 | 0.5μm/m3 | 1.0μm/ft3 | 1.0μm/m3 | 5.0μm/ft3 | 5.0μm/m3 |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
─ |
1 |
─ |
10 |
─ |
2 |
─ |
─ |
─ |
─ |
─ |
─ |
─ |
─ |
─ |
2 |
─ |
100 |
─ |
24 |
─ |
10 |
─ |
4 |
─ |
─ |
─ |
─ |
1 |
3 |
35 |
1,000 |
7 |
237 |
3 |
102 |
1 |
35 |
─ |
8 |
─ |
─ |
10 |
4 |
350 |
10,000 |
75 |
2,370 |
30 |
1,020 |
10 |
352 |
1 |
83 |
─ |
─ |
100 |
5 |
3,500 |
100,000 |
750 |
23,700 |
300 |
10,200 |
100 |
3,520 |
10 |
832 |
1 |
29 |
1 000 |
6 |
─ |
1,000,000 |
─ |
237,000 |
─ |
102,000 |
1,000 |
35,200 |
100 |
8320 |
10 |
293 |
10 000 |
7 |
─ |
─ |
─ |
─ |
─ |
─ |
10,000 |
352,000 |
1,000 |
83,200 |
100 |
2,930 |
100 000 |
8 |
─ |
─ |
─ |
─ |
─ |
─ |
100,000 |
3,520,000 |
10,000 |
832,000 |
1,000 |
29,300 |
1000 000 |
9 |
─ |
─ |
─ |
─ |
─ |
─ |
─ |
35,200,000 |
─ |
8,320,000 |
─ |
293,000 |